Rigaku Holdings Acquired by Onto Innovation | Technology M&A Deal

Onto Innovation has acquired Rigaku Holdings, a enterprise software business in Massachusetts, for $710M. Onto Innovation supplies inspection, metrology and lithography equipment for semiconductor and packaging applications, while Rigaku sells X-ray metrology tools used for semiconductor process R&D and high-volume manufacturing. The Rigaku Holdings acquisition is intended to expand X-ray metrology capabilities by integrating Onto’s Ai Diffract analysis software with Rigaku CD-SAXS platforms for critical dimension small-angle X-ray scattering. The technology M&A is structured as an add on acquisition, with Onto Innovation acquiring a 27% stake and the right to nominate one director, supporting a strategic acquisition alliance. The enterprise software acquisition is announced and expected to close in the second half of 2026, subject to customary regulatory approvals and closing conditions.